·The FSH Module consists of the Driver, Light, and FSH unit·A single image offers 3D information of the sample·Overcomes the limitations of prevalent optical science·Motion distance, depth increase, tilt/defocus automatic compensation, High Dynamic Range, High Sensitivity
·Three-Axis Auto System (X-Y/linear, Z/Ball Screw)·Large area scanning function (300 x 300 mm)·Can scan samples of various materials (semiconductor, PCB, memory, etc.)·Equipped with software for FSH inspection and measurement