Products
FSH Scanner
• 3 Axis Auto System (X-Y/linear, Z/Ball Screw)
• Capable of large area inspection (300×300 mm)
• Capable of shooting a wide variety object samples (semiconductor, PCB, memory, etc.)
• Equipped with S/W programs for FSH inspection and measurement
| Category | Specification | Notes |
|---|---|---|
Product |
CBX 1100 |
|
Size |
1,350(W) ⅹ1,350(D)ⅹ1,750(H) ㎜ |
|
Utility |
220V Single Phase, CDA 3/8" 1 Point |
|
Weight |
1,100㎏ |
|
Stage X-Y axis configuration |
Linear Motor |
|
X-Y axis speed |
Max 200 ㎜/sec |
|
Optical system Z-axis configuration |
Stepping Motor |
|
Z-axis speed |
Max 50 ㎜/sec |
|
| FSH Optics | ||
Working Distance |
20㎜ |
|
Depth Of Field range |
~3㎜ |
|
Resolution |
~1㎛ |
lateral optical resolution |
FOV |
1 x 1 ㎜ |
|
Laser Source |
532nm / 150mW (CLASS 3B) |
|
Scan Speed |
~ 15,000 lines/sec |
|
Scan Area |
300 x 300 ㎜ |
|